Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%

Nonlinear mode coupling in whispering-gallery-mode resonators

Whispering-gallery modes (WGMs) have been a source of fascination to physicists since at least the work of Lord Rayleigh in 1910 [1], when he explained the phenomenon that a whisper in one end of the gallery of St. Paul’s Cathedral could be heard at the other end. This phenomenon has practical implications as well, since WGMs in resonators with cylindrical or spherical symmetry can have very hi...

Coherent coupling of molecular resonators with a microcavity mode

The optical hybridization of the electronic states in strongly coupled molecule-cavity systems have revealed unique properties, such as lasing, room temperature polariton condensation and the modification of excited electronic landscapes involved in molecular isomerization. Here we show that molecular vibrational modes of the electronic ground state can also be coherently coupled with a microca...

UHF High-Order Radial-Contour-Mode Disk Resonators

A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining polysilicon surface-micromachining and metal electroplating to attain submicron lateral capacitive gaps, has been demonstrated at frequencies as high as 829 MHz and with Q’s as high as 23,000 at 193 MHz. Furthermore, the resonators have been demonstrated operating in the first three radial contour modes...

High-Q VHF Micromechanical Contour-Mode Disk Resonators

A micromechanical, laterally vibrating disk resonator, fabricated via a technology that combines polysilicon surface-micromachining and metal electroplating to attain submicron lateral capacitive gaps, has been demonstrated at frequencies approaching 160 MHz with Q's as high as 9,400— the highest demonstrated to date for an on-chip resonator in this frequency range. This frequency also represen...

Gallium Nitride Nanowire Electromechanical Resonators